DocumentCode
2476339
Title
P1D-4 Characteristics of a Novel Magnetic Field Sensor Using Piezoelectric Vibrations
Author
Dan, Keita ; Nakamura, Kentaro ; Ueha, Sadayuki
Author_Institution
Tokyo Inst. of Technol., Yokohama
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
1365
Lastpage
1368
Abstract
This report presents novel configurations for magnetic field sensor using piezoelectric vibrations, which are based on the simple electromagnetic physics and require no semiconductor materials. First, we present the principle and basic characteristics of the proposed sensor with a piezoelectric bending vibrator. Second, the sensor is applied to a scanning probe of a permeability microscope for surface mapping.
Keywords
bending; magnetic field measurement; magnetic sensors; piezoelectric devices; plates (structures); scanning probe microscopy; surface phenomena; vibrations; electromagnetic physics; magnetic field sensor characteristics; piezoelectric bending vibrator; piezoelectric vibration; scanning probe permeability microscope; surface mapping; Electrodes; Intelligent sensors; Magnetic field measurement; Magnetic sensors; Microscopy; Permeability; Semiconductor materials; Sensor phenomena and characterization; Vibration measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2007. IEEE
Conference_Location
New York, NY
ISSN
1051-0117
Print_ISBN
978-1-4244-1384-3
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2007.343
Filename
4409916
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