Monitoring on dry vacuum pump characteristics by mobile device

Author

Hsieh, Fan-Chun ; Chou, Shih-Chieh ; Lin, Ping-Hung ; Chang, Shian-Wen ; Chen, Fong-Zhi ; Liao, Tai-Shan ; Liu, Da-Ren ; Chiang, Donyau

Author_Institution

Instrum. Technol. Res. Center, Hsinchu, Taiwan

fYear

2012

fDate

13-16 May 2012

Firstpage

2444

Lastpage

2447

Abstract

Dry vacuum pump is a core device in semiconductor and electro-optic industries for vacuum purpose. The pumping characteristics of dry vacuum pump could affect significantly the performance of secondary pump. This article present a method which integrates a mobile device through the remote application program to measure the vacuum pressure, sound, vibration, and power for a dry vacuum pump system. Moreover, the LabVIEW was implemented to the system for pumping experiment control. The pumping characteristics monitored by mobile device can be useful for processing monitor.

Keywords

acoustic variables measurement; condition monitoring; mobile handsets; power measurement; pressure measurement; vacuum pumps; vibration measurement; virtual instrumentation; LabVIEW; core device; dry vacuum pump characteristic monitoring; electro-optic industries; mobile device; power measurement; remote application program; secondary pump; semiconductor industries; sound measurement; vacuum pressure measurement; vibration measurement; Androids; Instruments; Mobile handsets; Monitoring; Vacuum systems; Wireless communication; Wireless sensor networks; dry pump; mobile device; pumping characteristics;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International

Conference_Location

Graz

ISSN

1091-5281

Print_ISBN

978-1-4577-1773-4

Type

conf

DOI

10.1109/I2MTC.2012.6229217

Filename

6229217