DocumentCode
2477939
Title
P2G-5 Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonators
Author
Pensala, Tuomas ; Ylilammi, Markku ; Meltaus, Johanna ; Kokkonen, Kimmo
Author_Institution
VTT Tech. Res. Centre of Finland Espoo, Espoo
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
1661
Lastpage
1664
Abstract
Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.
Keywords
aluminium compounds; bulk acoustic wave devices; interferometry; thin films; zinc compounds; AlN; FEM simulation; ZnO; coupling coefficient; eigenmode spectrum compression; laser interferometry; resonator performance; thin film BAW resonators; vibration shape; Electric variables measurement; Interferometry; Laser excitation; Laser modes; Resonance; Resonant frequency; Shape; Size measurement; Transistors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2007. IEEE
Conference_Location
New York, NY
ISSN
1051-0117
Print_ISBN
978-1-4244-1384-3
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2007.418
Filename
4409991
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