P3I-5 Study on SAW Characteristics of Amorphous- TeO2/128°Y-X LiNbO3 Structures

Author

Shang, Xiaoli ; Gong, Xun ; Xiong, Jun ; Tong, Tangji ; Zhang, De

Author_Institution

Nanjing Univ., Nanjing

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1894

Lastpage

1896

Abstract

Theoretical calculations have been performed for the temperature stability of the amorphous TeO₂/128degY-X LiNbO₃ structure. The phase velocity, electromechanical coupling coefficient and temperature coefficient of delay (TCD) have been calculated. Amorphous TeO₂ film has been found as an attractive negative TCD over-layer that can yield a zero TCD when combined with a positive TCD material such as 128 deg Y-X LiNb03. And in comparison to conventional SiO₂ over-layer, the amorphous TeO_2´s film reaches the zero TCD under a much less thickness. The effect of the temperature coefficients of amorphous TeO_2´s elastic constants on the structure´s TCD has also been studied. We find the temperature coefficients of amorphous TeO₂ C_n have a more dominant effect on TCD.

Keywords

elastic constants; noncrystalline structure; piezoelectricity; surface acoustic waves; thermal stability; LiNbO₃; TeO₂; amorphous film; elastic constants; electromechanical coupling coefficient; phase velocity; surface acoustic waves; temperature coefficient of delay; temperature stability; Amorphous materials; Delay; Dielectric materials; Filtering theory; Laboratories; Stability; Substrates; Surface acoustic waves; Temperature sensors; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.476

Filename

4410049