• DocumentCode
    2480483
  • Title

    P4M-5 Accurate Assessment of CMUT Devices Through Precise Electrical Impedance Measurement in Air

  • Author

    Meynier, Cyril ; Certon, Dominique ; Teston, Franck ; Felix, Nicolas ; Ferin, Guillaume

  • Author_Institution
    Franc ois Rabelais Univ., Tours
  • fYear
    2007
  • fDate
    28-31 Oct. 2007
  • Firstpage
    2139
  • Lastpage
    2142
  • Abstract
    This paper reports a technique to exploit results from electrical impedance measurement of cMUT devices in air. An analytical ID model has been used as a fitting function. The accuracy of this model has been theoretically analysed.
  • Keywords
    electric impedance measurement; piezoelectric transducers; ultrasonic transducers; analytical 1D model; cMUT devices; electrical impedance measurement; fitting function; Analytical models; Biomembranes; Capacitance; Electrodes; Electrostatics; Impedance measurement; Piezoelectric polarization; Piezoelectric transducers; Resonance; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2007. IEEE
  • Conference_Location
    New York, NY
  • ISSN
    1051-0117
  • Print_ISBN
    978-1-4244-1384-3
  • Electronic_ISBN
    1051-0117
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2007.538
  • Filename
    4410111
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2480483