DocumentCode
2481824
Title
P5K-1 High Temperature Broadband Contact BAW Transducer
Author
Parks, David A. ; Tittmann, Bernhard R.
Author_Institution
Perm State Univ., Perm
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
2389
Lastpage
2392
Abstract
Aluminum nitride, AlN, point group 6 mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AIN can be used as a contact BAW transducer up to 600 C. The upper limit was set by coupling as opposed to element failure and it is anticipated that AIN can be used at temperatures substantially beyond this range.
Keywords
aluminium compounds; bulk acoustic wave devices; high-temperature electronics; piezoelectric materials; piezoelectric transducers; ultrasonic transducers; AlN; BAW contact transducer; aluminum nitride single crystal; broadband transducer; high temperature piezoelectric material; Aluminum nitride; Conducting materials; Crystalline materials; Frequency; Piezoelectric devices; Piezoelectric materials; Piezoelectric transducers; Signal to noise ratio; Stress; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2007. IEEE
Conference_Location
New York, NY
ISSN
1051-0117
Print_ISBN
978-1-4244-1384-3
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2007.601
Filename
4410174
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