P5K-5 Performance Estimation of Ultra-Miniature One Dimensional Array Ultrasound Probe with Hydrothermally Synthesized PZT Polycrystalline Film Transducers

One-dimensional array ultrasound probe was fabricated with 8 hydrothermally synthesized lead zirconate titanate (PZT) poly-crystalline film transducer elements with element width of about 40 mum, element length of 4 mm and element pitch of 75 mum by deposition of PZT poly-crystalline films on the titanium (Ti) electrode array on the hydroxyapatite (HAp) substrate. Although this ultrasound probe has no acoustic matching layer, it was found that it could receive ultrasound pulse with wide frequency band and short duration time. Furthermore, this 1 D array probe showed element factor of +/- 68 degree in scanning direction and element factor of about +/- 3 degree in slice direction and group factor of about +/- 6 degree in scanning direction, This probe has very wide element factor in scanning direction. However, it could be confirmed that the sensitive area in the receiving sensitivity can be concentrated within the narrow angel range of +/- 6 degree in desired front direction when ultrasound pulse wave was received with all 8 transducer elements in the test fabricated 1D array probe.