P6E-5 Analysis of PZT Layer Thickness in Traveling Wave Ultrasonic Motor Performance

One of TWUSM piezoelectric motors design steps is dimensioning the stator, based on its electrical and mechanical characteristics. The approach for some parameters determination like diameter of PZT disc, and teeth/slit width ratio is discussed in some papers [1], [2]. However, a procedure for finding the thickness of the piezoelectric layer in the stator, and its relations to the electrical or mechanical characteristics are not clearly presented yet. So, the main purpose of this study is to analyze the relations between PZT thickness and TWUSM characteristics.