P6G-4 High Q-factor STW-Resonators on AT-Cut of Quartz

Author

Kim, C.U. ; Wang, W. ; Plessky, V.P. ; Grigorievski, V.I.

Author_Institution

Ulsan Univ., Ulsan

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

2582

Lastpage

2585

Abstract

Surface transverse wave-resonators with resonant frequency near 1900 MHz on AT-cut of quartz with different periods of interdigital transducer and reflectors are reported. It is established that for metal thickness to wavelength ratio 1.9% the use of reflectors with gradually increasing periodicity gives the highest resonance Q-factor. Application of uniform reflectors with center frequency immediately shifted down to set the resonance at the center of reflection stopband results in 9.2% decrease of Q-factor that is attributed to the bulk wave scattering at the break of periodicity. Fabricated test samples of one-port resonators show unloaded Q-factors up to 7200.

Keywords

Q-factor; interdigital transducers; quartz; surface acoustic wave resonators; surface acoustic wave transducers; AT-cut quartz; Q-factor; STW-resonator; bulk wave scattering; interdigital reflector; interdigital transducer; metal thickness; one-port resonator; surface acoustic waves;; surface transverse wave-resonator; Acoustic devices; Acoustic scattering; Acoustic transducers; Acoustic waves; Electrodes; Q factor; Rayleigh scattering; Resonance; Resonant frequency; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.650

Filename

4410223