• DocumentCode
    2483816
  • Title

    Investigation of charge carrier dynamics in silicon wafers using terahertz imaging spectroscopy

  • Author

    Arnold, Thomas ; De Biasio, Martin ; Mühleisen, Wolfgang ; Leitner, Raimund

  • Author_Institution
    CTR Carinthian Tech Res. AG, Villach, Austria
  • fYear
    2012
  • fDate
    13-16 May 2012
  • Firstpage
    2478
  • Lastpage
    2481
  • Abstract
    Terahertz time-domain spectroscopy can be used to characterize silicon solar cell properties such as: conductivity, charge carrier mobility and density. Moreover, THz spectroscopy and imaging can be used for defect analysis in semiconductor and photovoltaic materials. This paper describes the investigation of optically injected charge carrier dynamics by the use of THz spectroscopy. THz-pump/THz-probe measurements were carried out at different measurement positions on silicon wafers which were illuminated by a metal-halid light source. Results indicate that THz time-domain spectroscopy is a promising technique for the characterization of silicon wafers for photovoltaic industry.
  • Keywords
    carrier mobility; elemental semiconductors; silicon; solar cells; terahertz spectroscopy; terahertz wave imaging; Si; optically injected charge carrier dynamics; photovoltaic material; silicon wafer; terahertz imaging spectroscopy; terahertz time domain spectroscopy; Delay; Light sources; Measurement by laser beam; Semiconductor device measurement; Silicon; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
  • Conference_Location
    Graz
  • ISSN
    1091-5281
  • Print_ISBN
    978-1-4577-1773-4
  • Type

    conf

  • DOI
    10.1109/I2MTC.2012.6229574
  • Filename
    6229574