DocumentCode
2483816
Title
Investigation of charge carrier dynamics in silicon wafers using terahertz imaging spectroscopy
Author
Arnold, Thomas ; De Biasio, Martin ; Mühleisen, Wolfgang ; Leitner, Raimund
Author_Institution
CTR Carinthian Tech Res. AG, Villach, Austria
fYear
2012
fDate
13-16 May 2012
Firstpage
2478
Lastpage
2481
Abstract
Terahertz time-domain spectroscopy can be used to characterize silicon solar cell properties such as: conductivity, charge carrier mobility and density. Moreover, THz spectroscopy and imaging can be used for defect analysis in semiconductor and photovoltaic materials. This paper describes the investigation of optically injected charge carrier dynamics by the use of THz spectroscopy. THz-pump/THz-probe measurements were carried out at different measurement positions on silicon wafers which were illuminated by a metal-halid light source. Results indicate that THz time-domain spectroscopy is a promising technique for the characterization of silicon wafers for photovoltaic industry.
Keywords
carrier mobility; elemental semiconductors; silicon; solar cells; terahertz spectroscopy; terahertz wave imaging; Si; optically injected charge carrier dynamics; photovoltaic material; silicon wafer; terahertz imaging spectroscopy; terahertz time domain spectroscopy; Delay; Light sources; Measurement by laser beam; Semiconductor device measurement; Silicon; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location
Graz
ISSN
1091-5281
Print_ISBN
978-1-4577-1773-4
Type
conf
DOI
10.1109/I2MTC.2012.6229574
Filename
6229574
Link To Document