DocumentCode
2488513
Title
Modern Technologies
Author
Ura, F.
fYear
1972
fDate
1972
Firstpage
78
Lastpage
78
Keywords
Bonding; Chemical technology; Chemical vapor deposition; Electron beams; Electronics industry; Epitaxial growth; Ion beams; Ion implantation; Laboratories; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
26th Annual Symposium on Frequency Control. 1972
Type
conf
DOI
10.1109/FREQ.1972.199891
Filename
1536831
Link To Document