Chip-scale High-speed Fourier-transform Spectrometer Based on a Combination of a Michelson and a Fabry-Perot Interferometer

Author

Yu, Kyoungsik ; Park, Namkyoo ; Lee, Daesung ; Solgaard, Olav

Author_Institution

Seoul Nat. Univ., Seoul

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

412

Lastpage

415

Abstract

We report on a cascade combination of a micromachined Michelson interferometer and Fabry-Perot interferometer for compact and high-resolution Fourier-transform spectrometry. The micromirror in the Michelson interferometer is driven near its resonance frequency for large optical path length modulation and high-speed interferogram measurements. A simple bulk micromachining process is used to fabricate all optical components on a silicon optical bench platform.

Keywords

Michelson interferometers; interference spectrometers; micromachining; micromirrors; silicon; Fabry-Perot interferometer; Fourier-transform spectrometer; Michelson interferometer; Si; bulk micromachining; chip-scale spectrometer; high-speed interferogram measurements; high-speed spectrometer; micromirror; silicon optical bench platform; Fabry-Perot interferometers; Frequency measurement; High speed optical techniques; Micromirrors; Optical devices; Optical interferometry; Optical modulation; Resonance; Resonant frequency; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355493

Filename

4178645