DocumentCode
2494996
Title
Frequency Tuning of Quartz Resonators by Plasma Anodization
Author
Reche, J.H.
fYear
1978
fDate
1978
Firstpage
299
Lastpage
303
Keywords
Chemicals; Electrodes; Frequency; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing; Plasma stability; Plasma temperature; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
32nd Annual Symposium on Frequency Control. 1978
Type
conf
DOI
10.1109/FREQ.1978.200252
Filename
1537192
Link To Document