Microfabricated Platform for Nanoscale Flow Sensing and Control

Author

Shin, Jeyong ; Tai, Yu-Chong ; Miao, Yunan ; Lee, Terry D.

Author_Institution

California Inst. of Technol., Pasadena

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

1432

Lastpage

1435

Abstract

In this paper we describe a microfabricated platform for nanoscale flow sensing and control. Two custom-built pneumatically-driven pumps were used to deliver two different fluids into our microfluidic chip. The two liquids were mixed on-chip and the flow rate and composition of the resulting liquid was measured. Flow rate measurements were accurate within a few nL/min and the composition within 0.2%. In this paper, composition is defined as the makeup (by volume and expressed as a percentage) of a binary mixture. Feedback from the sensors was used to control the pumps in order to produce the desired flow profiles.

Keywords

flow control; flow sensors; microfluidics; microsensors; nanotechnology; pneumatic systems; pumps; flow rate measurements; microfabricated platform; microfluidic chip; nanoscale flow control; nanoscale flow sensing; pneumatically-driven pumps; Fabrication; Feedback; Fluid flow control; Fluid flow measurement; Pumps; Semiconductor device measurement; Sensor phenomena and characterization; Sensor systems; Stability; USA Councils;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355902

Filename

4178897