DocumentCode
2498783
Title
High-Sensitivity Bi-Directional Flow Sensor Based on Biological Inspiration of Animal Haircell Sensors
Author
Tucker, Craig ; Chen, Nannan ; Engel, Jonathan ; Yang, Yingchen ; Pandya, Saunvit ; Liu, Chang
Author_Institution
Univ. of Illinois Urbana-Champaign, Urbana
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
1440
Lastpage
1442
Abstract
Artificial haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6 mm/s flow rates, steady state flow fields detected down to 0.1 mm/s.
Keywords
flow sensors; microsensors; AHC sensor; MEMS process; animal haircell sensors; biological inspiration; high-sensitivity bi-directional flow sensor; oscillating flow field measurements; Animals; Bidirectional control; Biosensors; Etching; Fabrication; Hair; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2006. 5th IEEE Conference on
Conference_Location
Daegu
ISSN
1930-0395
Print_ISBN
1-4244-0375-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.355904
Filename
4178899
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