DocumentCode
2498904
Title
Bonding of indium phosphide layers on silicon substrates
Author
Lammasniemi, J. ; Jalonen, M. ; Rakennus, K. ; Asonen, H. ; Pessa, M.
Author_Institution
Dept. of Phys., Tampere Univ. of Technol., Finland
fYear
1993
fDate
19-22 Apr 1993
Firstpage
361
Lastpage
364
Abstract
Indium phosphide layers were bonded on silicon substrates by indium antimonide and gold based eutectic alloys. Although the thermal expansion coefficient of InSb is the same as that of InP, the bonding did not succeed with this material. When using Au based eutectic alloys, the bonding was successful. Large areas could be bonded homogeneously, and InP solar cells were processed on these structures with good characteristics. Because the solar cell is a minority carrier device, its characteristics are significantly worsened by the dislocations which reduce the minority carrier diffusion length. The bonding method has been applied for transferring InP layers on Si to avoid the formation of misfit dislocations at the interface
Keywords
III-V semiconductors; carrier lifetime; dislocations; elemental semiconductors; indium compounds; minority carriers; semiconductor heterojunctions; semiconductor technology; silicon; solar cells; Au based eutectic alloys; InP-Si; Si substrate; bonding; carrier diffusion length; dislocations; minority carrier device; semiconductors; solar cells; thermal expansion coefficient; Bonding; Etching; Gallium arsenide; Gold alloys; Indium phosphide; Photovoltaic cells; Silicon alloys; Substrates; Temperature; Thermal expansion;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Conference_Location
Paris
Print_ISBN
0-7803-0993-6
Type
conf
DOI
10.1109/ICIPRM.1993.380635
Filename
380635
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