DocumentCode
2499650
Title
Elements of SAW Resonator Fabrication and Performance
Author
Tanski, William J.
fYear
1981
fDate
27-29 May 1981
Firstpage
388
Lastpage
394
Keywords
1f noise; Etching; Fabrication; Oscillators; Plasma applications; Resonant frequency; Resonator filters; Surface acoustic wave devices; Surface acoustic waves; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Thirty Fifth Annual Frequency Control Symposium. 1981
Type
conf
DOI
10.1109/FREQ.1981.200503
Filename
1537443
Link To Document