Correlation between interfacial defects and electrical properties of LP-MOCVD GaInAs/InP heterostructures, application to high performance 1.67 μm GaInAs/InP PiN photodiodes

Author

di Forte-Poisson, M.A. ; Brylinski, C. ; Herbeaux, C. ; Androussi, Y. ; Lefebvre, A. ; Persio, J. Di ; Vassilakis, E. ; Herrbach, F. ; Carriére, C.

Author_Institution

Thomson-CSF, Orsay, France

fYear

1993

fDate

19-22 Apr 1993

Firstpage

131

Lastpage

134

Abstract

The authors report on low pressure-metal-organic chemical vapor deposition (LP-MOCVD) growth and the properties of GaInAs/InP double heterostructures grown on InP substrate. Some critical points for the LP-MOCVD process are the quality of the sources and appropriate growth conditions. These critical parameters were investigated together with the effect of different switching sequences from InP to GaInAs on the crystallographic and electrical properties of the direct InP/GaInAs interface. The relationship between crystallographic and electrical properties of GaInAs/InP interfaces is demonstrated. In addition a good correlation between such properties and performance of GaInAs/InP PiN photodiodes was observed

Keywords

III-V semiconductors; chemical vapour deposition; crystal defects; gallium arsenide; indium compounds; interface states; interface structure; p-i-n photodiodes; semiconductor growth; semiconductor heterojunctions; surface structure; GaInAs-InP; PiN photodiodes; crystallographic properties; electrical properties; heterostructures; interfacial defects; low pressure-metal-organic chemical vapor deposition; switching sequences; Capacitance-voltage characteristics; Dark current; Degradation; Etching; Gain measurement; Indium phosphide; Metallization; Photodiodes; Silicon alloys; X-ray diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on

Conference_Location

Paris

Print_ISBN

0-7803-0993-6

Type

conf

DOI

10.1109/ICIPRM.1993.380692

Filename

380692