Progress in the Development of Miniature Thin Film Baw Resonator and Filter Technology

Author

Grudkowski, T.W. ; Black, J.F. ; Drake, G.W. ; Cullen, D.E.

fYear

1982

fDate

2-4 June 1982

Firstpage

537

Lastpage

548

Keywords

Boron; Chemicals; Etching; Fabrication; Resonator filters; Silicon; Sputtering; Substrates; Transistors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

36th Annual Symposium on Frequency Control. 1982

Conference_Location

Philadelphia, Pennsylvania, USA

Type

DOI

10.1109/FREQ.1982.200621

Filename

1537561

Link To Document