DocumentCode
2503197
Title
Surface Wave Resonators on Silicon
Author
Martin, S.J. ; Gunshor, R.L. ; Miller, T.J. ; Datta, S. ; Pierret, R.F. ; Melloch, M.R.
fYear
1983
fDate
1-3 June 1983
Firstpage
423
Lastpage
427
Keywords
Optical attenuators; Optical films; Optical resonators; Optical surface waves; Propagation losses; Silicon; Substrates; Surface acoustic waves; Surface waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
37th Annual Symposium on Frequency Control. 1983
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1983.200702
Filename
1537642
Link To Document