DocumentCode
2504004
Title
Etch Figures and Etch Rates in AT, BT, X and Y Cut Quartz Plates
Author
Tellier, C.R.
fYear
1984
fDate
May 29 1984-June 1 1984
Firstpage
105
Lastpage
113
Keywords
Crystallography; Etching; Isothermal processes; Numerical analysis; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface texture; Surface topography; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
38th Annual Symposium on Frequency Control. 1984
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1984.200744
Filename
1537684
Link To Document