• DocumentCode
    2507788
  • Title

    Preparation of carbon microcoils/nanocoils and ceramic microcoils, and their properties

  • Author

    Motojima, OS ; Iwanaga, H. ; Hashishin, T. ; Kojima, T. ; Tsuda, T.

  • Author_Institution
    Gifu Univ., Japan
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1
  • Lastpage
    8
  • Abstract
    In the review, we introduce the new measurement procedures of the microcoils made of silicon nitride and carbon obtained by the catalytic CVD process, and then describe the mechanical and electrical properties of the microcoils.
  • Keywords
    carbon; ceramics; chemical vapour deposition; coils; elastic moduli measurement; electrical resistivity; elongation; friction; nanowires; reviews; shear modulus; shear strength; silicon compounds; stress-strain relations; tensile testing; C; C microcoils/nanocoils; Si3N4; Si3N4 microcoils; catalytic chemical vapour deposition process; ceramic microcoils; electrical properties; measurement procedures; mechanical properties; preparation; review; Ceramics; Coils; Glass; Length measurement; Mechanical factors; Mechanical variables measurement; Optical microscopy; Silicon; Springs; Steel;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micromechatronics and Human Science, 2002. MHS 2002. Proceedings of 2002 International Symposium on
  • Print_ISBN
    0-7803-7611-0
  • Type

    conf

  • DOI
    10.1109/MHS.2002.1058002
  • Filename
    1058002
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2507788