Design and fabrication of silicon micro components

Author

Buttgenbach, Stephanus

Author_Institution

Inst. for Microtechnology, Technische Univ. Braunschweig, Germany

fYear

2002

fDate

2002

Firstpage

9

Lastpage

16

Abstract

Due to their manifold benefits, microsystems are being regarded as a key technology for innovation in many branches of industry. One of the leading techniques for the fabrication of microsystems is silicon micromachining. The paper reports on a modular CAD environment for the design of silicon micro components and gives some examples of micromachined devices developed at Braunschweig, including a micro tactile sensor, micro gripper, and micro chemical analysis system.

Keywords

CAD; chemical sensors; elemental semiconductors; mechanical engineering computing; microactuators; micromachining; microsensors; silicon; tactile sensors; Si; Si micromachining; mechanical engineering products; micro chemical analysis system; micro grippers; micro tactile sensors; micromachined devices; micromechatronics; microsystems; miniaturization; modular CAD environment; silicon micromachined micro-components; Anisotropic magnetoresistance; Chemical analysis; Chemical technology; Dry etching; Fabrication; Integrated circuit technology; Mechatronics; Microelectronics; Micromachining; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2002. MHS 2002. Proceedings of 2002 International Symposium on

Print_ISBN

0-7803-7611-0

Type

conf

DOI

10.1109/MHS.2002.1058003

Filename

1058003