Design of low actuation voltage RF MEMS cantilever switch

Author

Kanthamani, S. ; Raju, S. ; Kumar, Abhai V.

Author_Institution

Dept. of ECE, Thiagarajar Coll. of Eng., Madurai

fYear

2008

fDate

21-24 Nov. 2008

Firstpage

584

Lastpage

586

Abstract

This paper presents the design and RF characterization of micro electromechanical system (MEMS) switches realized on elevated coplanar waveguide for high-speed applications. The capacitive air gap between signal line and the cantilever is 1 um. The lowest actuation voltage obtained is 6 V. The insertion loss of switch and its associated transmission line is -0.31 dB (mainly contributed by the transmission line itself) and the isolation was around -21.67 dB at 40 GHz.

Keywords

cantilevers; coplanar waveguide components; microswitches; microwave switches; millimetre wave devices; elevated coplanar waveguide; frequency 40 GHz; loss 0.31 dB; low actuation voltage RF MEMS cantilever switch; microelectromechanical system switches; size 1 mum; voltage 6 V; Coplanar transmission lines; Coplanar waveguides; Electromechanical systems; Insertion loss; Low voltage; Micromechanical devices; Propagation losses; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Elevated coplanar waveguide; MEMS; high speed;

fLanguage

English

Publisher

ieee

Conference_Titel

Recent Advances in Microwave Theory and Applications, 2008. MICROWAVE 2008. International Conference on

Conference_Location

Jaipur

Print_ISBN

978-1-4244-2690-4

Electronic_ISBN

978-1-4244-2691-1

Type

conf

DOI

10.1109/AMTA.2008.4763058

Filename

4763058