DocumentCode

2513711

Title

Preparation and Characterization of RF Sputtered BaTiO3Thin Films

Author

Sreenivas, K. ; Mansingh, Abhai

fYear

1986

fDate

8-11 June 1986

Firstpage

602

Lastpage

605

Keywords

Annealing; Argon; Crystallization; Grain size; Optical films; Radio frequency; Silicon; Sputtering; X-ray diffraction; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on

Conference_Location

Bethlehem, PA, USA

Type

conf

DOI

10.1109/ISAF.1986.201216

Filename

1538156