Etched Piezoelectric Structures

Author

Trolier, S. ; Geist, C. ; Safari, A. ; Newnham, R.E. ; Xu, Q.C.

fYear

1986

fDate

8-11 June 1986

Firstpage

707

Lastpage

710

Keywords

Chemicals; Electronics industry; Etching; Piezoelectric devices; Production; Resists; Resonance; Resonant frequency; Substrates; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on

Conference_Location

Bethlehem, PA, USA

Type

DOI

10.1109/ISAF.1986.201240

Filename

1538180

Link To Document