DocumentCode
2515739
Title
Electric charge 3-dimensional profile measurement in dielectrics using acoustic microscope probe head
Author
Qin, Xiaokui ; Suzuki, Ken ; Sazaki, Masatada ; Tanaka, Yasuhiro ; Takada, Tatsuo
Author_Institution
Pohl Inst. of Solid State Phys., Tongji Univ., Shanghai, China
fYear
1998
fDate
22-25 Jun 1998
Firstpage
13
Lastpage
16
Abstract
In this paper, we report our attempt of measuring the three-dimensional space charge distribution in a PMMA plate, which is irradiated by an electron beam, using an acoustic lens by the pressure wave propagation (PWP) method
Keywords
acoustic microscopy; charge measurement; dielectric measurement; electron beam effects; polymers; space charge; PMMA; acoustic lens; acoustic microscope probe head; dielectric plate; electron beam irradiation; pressure wave propagation method; space charge distribution; three-dimensional profile measurement; Acoustic measurements; Acoustic waves; Charge measurement; Current measurement; Dielectric measurements; Electric variables measurement; Electron beams; Lenses; Pressure measurement; Space charge;
fLanguage
English
Publisher
ieee
Conference_Titel
Conduction and Breakdown in Solid Dielectrics, 1998. ICSD '98. Proceedings of the 1998 IEEE 6th International Conference on
Conference_Location
Vasteras
Print_ISBN
0-7803-4237-2
Type
conf
DOI
10.1109/ICSD.1998.709216
Filename
709216
Link To Document