DocumentCode
2517765
Title
Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films
Author
Kotera, Hidetoshi ; Kanno, Isaku ; Inoue, Takafumi ; Suzuki, Takaaki
Author_Institution
Micro Eng., Kyoto Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
31
Lastpage
32
Abstract
In this paper we present the piezoelectric-driven deformable micro-mirror for optical wavefront correction. The mirror membrane was fabricated on diaphragm structure composed of piezoelectric PZT thin films on Si substrate. The application of voltage induced large deflection of the surface of the diaphragm
Keywords
adaptive optics; diaphragms; micromirrors; piezoelectric thin films; silicon; PZT; PbZrO3TiO3; Si; Si substrate; adaptive optics; diaphragm structure; mirror membrane fabrication; optical wavefront correction; piezoelectric PZT thin films; piezoelectric-driven deformable micromirror; voltage induced large deflection; Adaptive optics; Biomembranes; Electrodes; Mirrors; Optical films; Piezoelectric films; Retina; Semiconductor thin films; Sputtering; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540061
Filename
1540061
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