DocumentCode
2518203
Title
Microdevices for high resolution measurement
Author
Manalis, Scott ; Burg, Thomas ; Sparks, Andrew
Author_Institution
Massachusetts Inst. of Technol., Cambridge, MA
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
75
Lastpage
76
Abstract
We summarize two on-going projects: suspended microchannel resonator for biomolecular detection and scanning probe microscopy with inherent disturbance suppression. The microfabricated devices with optical readout are used for high resolution measurement
Keywords
biological techniques; micro-optics; micromechanical resonators; molecular biophysics; scanning probe microscopy; biomolecular detection; high resolution measurement; inherent disturbance suppression; microfabricated devices; optical readout; scanning probe microscopy; suspended microchannel resonator; Biomedical optical imaging; Microchannel; Microscopy; Optical interferometry; Optical resonators; Probes; Resonance; Resonant frequency; Surfaces; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540084
Filename
1540084
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