• DocumentCode
    2518623
  • Title

    Electrostatic micro-shutter array for infrared spectrograph

  • Author

    Takahashi, Takuya ; Mita, Makoto ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

  • Author_Institution
    Inst. of Ind. Sci., Tokyo Univ.
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    119
  • Lastpage
    120
  • Abstract
    We report an electrostatic micro shutter array for astronomical telescopes for parallel processing infrared spectroscopy of multiple celestial objects using bulk-micromachining of silicon-on-insulator wafers. Successful operation of micro torsion shutter to a 90-degree-deflection has been demonstrated with applied voltages of up to 95 V DC
  • Keywords
    astronomical telescopes; electrostatic devices; infrared astronomy; infrared spectroscopy; micro-optics; micromachining; silicon-on-insulator; 95 V; Si-SiO2; astronomical telescopes; bulk-micromachining; electrostatic microshutter array; micro torsion shutter; multiple celestial objects; parallel processing infrared spectroscopy; silicon-on-insulator wafers; Bars; Electrostatics; Etching; Infrared spectra; Observatories; Optical arrays; Silicon on insulator technology; Spectroscopy; Telescopes; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540107
  • Filename
    1540107
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2518623