DocumentCode
2518692
Title
Micro-encoder using image obtained by ball lens assembled inside wafer
Author
Sasaki, Minoru ; Nakai, Fuki ; Hane, Kazuhiro ; Yokomizo, Kanji ; Hori, Kazuhito
Author_Institution
Dept. of Nanomech., Tohoku Univ., Sendai
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
125
Lastpage
126
Abstract
An absolute micro-encoder based on the code imaging is developed. The ball lens (phi300 mum) is assembled inside the cavity between the pyrex glass lid and suspensions in the handling Si layer of the SOI wafer. The photodiode array is prepared in the device Si layer. The image of the scale is incident on the backside of the photodiodes. The electrical wiring to photodiodes does not disturb the optics. The current signal shows the sufficient contrast for resolving the maximum length code having the minimum line width of 13.6 mum
Keywords
image coding; microlenses; microsensors; photodiodes; silicon; silicon-on-insulator; 300 micron; SOI wafer; Si; Si layer; Si-SiO2; absolute microencoder; ball lens; code imaging; electrical wiring; maximum length code; photodiode array; pyrex glass lid; suspensions; Assembly systems; Displacement measurement; Glass; Length measurement; Lenses; Optical arrays; Optical sensors; Photodiodes; Position measurement; Rotation measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540110
Filename
1540110
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