DocumentCode
2518801
Title
Experimental design of exit wave reconstruction from a transmission electron microscope defocus series
Author
Miedema, M.A.O. ; van den Bos, A. ; Buist, A.H.
Author_Institution
TNO Phys. & Electron. Lab., The Hague, Netherlands
fYear
1993
fDate
18-20 May 1993
Firstpage
482
Lastpage
485
Abstract
Recently published methods reconstruct the complex exit wave of the specimen in a transmission electron microscope (TEM) by combining a number of images recorded at different defocus values. The imaging model for a TEM is in principle nonlinear, but it may be linearized for a wide range of specimens. This linearization is used. Because the pixel intensities of the recorded image are Poisson variates, the reconstruction problem has to be viewed as a statistical parameter estimation problem. An expression is derived for the variance of the reconstructed wave as a function of the experimental parameters that can be freely chosen. It is shown how these parameters can be used for experimental design, that is for the minimizing of the variance of the reconstructed wave
Keywords
digital simulation; error analysis; image reconstruction; linearisation techniques; minimisation; parameter estimation; physics computing; statistical analysis; transmission electron microscopy; Poisson variates; TEM; complex exit wave; defocus series; defocus values; exit wave reconstruction; experimental design; images; imaging model; linearization; pixel intensities; reconstructed wave; statistical parameter estimation; transmission electron microscope; variance minimisation; Design for experiments; Differential equations; Electron microscopy; Fourier transforms; Frequency; Image reconstruction; Laboratories; Physics; Transfer functions; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 1993. IMTC/93. Conference Record., IEEE
Conference_Location
Irvine, CA
Print_ISBN
0-7803-1229-5
Type
conf
DOI
10.1109/IMTC.1993.382595
Filename
382595
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