Honeycomb textured front surface of monocrystalline silicon and borosilicate glass substrates

Author

Manea, Elena ; Budianu, E. ; Purica, M. ; Cernica, I. ; Ciuciumis, A. ; Babarada, Fl

Author_Institution

Dept. of Technol., Nat. Inst. for R&D in Microtechnol., Bucharest

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

147

Lastpage

148

Abstract

We present the results of an experimental study regarding the increase of the silicon solar cells efficiency by texturing the front surface and the fabrication of microcells on borosilicate glass substrate using silicon micromachining technologies. A `honeycomb´ textured front surface has been obtained using a photolithography process to generate patterns (disc hole) on the top surface followed by isotropic etching

Keywords

borosilicate glasses; elemental semiconductors; etching; honeycomb structures; micro-optics; micromechanical devices; optical fabrication; optical glass; photolithography; silicon; solar cells; B₂O₃-SiO₂; Si; borosilicate glass substrate; honeycomb textured front surface; isotropic etching; microcells fabrication; monocrystalline silicon; photolithography process; silicon micromachining technology; silicon solar cells efficiency; Etching; Fabrication; Glass; Lithography; Microcell networks; Micromachining; Photovoltaic cells; Silicon; Solar power generation; Surface texture;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540121

Filename

1540121