• DocumentCode
    2519137
  • Title

    Deformable mems grating for wide tunability

  • Author

    Tormen, M. ; Peter, Y.A. ; Niedermann, Ph. ; Hoogerwerf, A. ; Stanley, R.

  • Author_Institution
    Centre Suisse d´´Electron. et de Microtech., Neuchatel
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    175
  • Lastpage
    176
  • Abstract
    A deformable MEMS grating is presented. Electrostatic actuation allows a per cent tuning of up to 2.5%. This device can be used as tuning element in an external cavity mid-infrared quantum-cascade laser
  • Keywords
    diffraction gratings; electrostatic actuators; laser cavity resonators; laser tuning; micro-optics; quantum cascade lasers; deformable MEMS grating; external cavity mid-infrared quantum-cascade laser; tuning element; Actuators; Gas lasers; Gratings; Laser tuning; Micromechanical devices; Optical films; Quantum cascade lasers; Springs; Testing; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540135
  • Filename
    1540135
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2519137