DocumentCode
2519360
Title
Effects of a loop array layer on a micro-inductor for future RF MEMS components
Author
Tassetti, Charles-Marie ; Lissorgues, Gaëlle ; Gilles, Jean-Paul
Author_Institution
Groupe ESIEE, Cite Descartes, Noisy-Le-Grand, France
Volume
1
fYear
2003
fDate
7-9 Oct. 2003
Firstpage
29
Abstract
Tunable micro-inductors can be designed controlling magnetic coupling coefficient. This paper presents the inductance variation produced by loops strongly magnetically coupled with a micro-inductor. A compact lumped element model, based on the geometry, gives result in good agreement with measurements in the RF frequency range. Then, this model will be applied to the study of the tunable MEMS inductor described below.
Keywords
UHF devices; electromagnetic coupling; equivalent circuits; inductance; inductors; micromechanical devices; tuning; RF MEMS components; compact lumped element model; equivalent circuit; equivalent impedance; inductance variation; loop array layer; magnetic coupling coefficient; short-circuit configuration; tunable micro-inductors; Coupling circuits; Impedance; Inductance; Inductors; Magnetic materials; Magnetic shielding; Micromechanical devices; Permeability; Radiofrequency microelectromechanical systems; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003. 33rd European
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMC.2003.1262210
Filename
1262210
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