• DocumentCode
    252666
  • Title

    Highly stable chemical N-doping of graphene nanomesh FET

  • Author

    Al-Mumen, Haider ; Lixin Dong ; Wen Li

  • Author_Institution
    Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA
  • fYear
    2014
  • fDate
    13-16 April 2014
  • Firstpage
    72
  • Lastpage
    76
  • Abstract
    N-type doping of graphene with long-term air stability represents a significant challenge for practical application of graphene electronics. This paper reports a reversible doping method that uses SU-8 photoresist as a doping and encapsulating material to enable highly air-stable n-type semiconducting properties of graphene. The SU-8 resist simultaneously serves as an effective electron dopant, a dielectric medium, and an excellent encapsulating layer. The air-stable n-type characteristics of the as-doped graphene were verified by Raman spectra and transport properties. The SU-8 doping has minimum damage to the hexagonal lattice of graphene and can be reversed by removing the uncrosslinked SU-8 resist.
  • Keywords
    Raman spectra; doping profiles; field effect transistors; graphene; photoresists; semiconductor doping; Raman spectra; SU-8 photoresist; dielectric medium; doping material; electron dopant; encapsulating layer; encapsulating material; graphene electronics; graphene nanomesh FET; hexagonal lattice; highly stable chemical N-doping; long term air stability; reversible doping method; transport properties; Doping; Graphene; Lattices; Logic gates; Resists; Thermal stability; Transistors; doping; graphene; nanomesh; transistor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
  • Conference_Location
    Waikiki Beach, HI
  • Type

    conf

  • DOI
    10.1109/NEMS.2014.6908762
  • Filename
    6908762