Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

Author

Meng Tang ; Cagliani, Alberto ; Davis, Zachary J. ; Lin He

Author_Institution

Dept. of Electron. & Inf., Soochow Univ., Suzhou, China

fYear

2014

fDate

13-16 April 2014

Firstpage

216

Lastpage

219

Abstract

A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.

Keywords

chemical sensors; humidity sensors; microactuators; micromechanical resonators; MEMS resonator; bulk disk resonator; capacitive readout scheme; dynamic mode; feedback loop; feedthrough compensation; humidity sensing application; liquid bio-chemical sensing environment; mass sensing; microelectromechanical systems; pulse mode actuation-readout system; readout circuitry; simple straightforward nonloop pulse mode actuation; Frequency measurement; Humidity; Humidity measurement; Micromechanical devices; Resonant frequency; Sensors; Vibrations; humidity sensing; mass sensing; pulse mode; resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on

Conference_Location

Waikiki Beach, HI

Type

conf

DOI

10.1109/NEMS.2014.6908794

Filename

6908794