Selective patterning of indium tin oxide films using 1064 nm laser for micro parts processing

We report the experimental and analysis results of micro parts processing using 1064 nm Nd:YVO₄ laser direct-write micro patterning of indium tin oxide (ITO) thin films and then followed by electroforming on the patterns. Compared with conventional photolithographic and etching technologies, direct-write micro-patterns of ITO using Nd:YVO₄ laser at proper control can achieve high quality of surface without requiring numerous processing steps. Using diffractive multiple Nd:YVO₄ beam, the ITO thin film could be removed without any damage to the glass structure. After laser patterning, a high overlapping area of laser spot was used to pattern the electrode layer on film surface for obtaining a fine ablated edge profile. Accordingly, the micro parts can be obtained using electroforming and release process via laser-patterned ITO films. The new micro parts processing is a maskless, dry and low-cost process instead of the complex photolithography, sputtering and sacrificial layer.