AlN based piezoelectric force sensor for energy autonomous sensor systems

Author

Feili, D. ; Barra, M. ; Ziegler, Marcus ; Seidel, H.

Author_Institution

Dept. of Mechatron., Saarland Univ., Saarbrücken, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

1072

Lastpage

1075

Abstract

This work deals with the design development and test of an AlN based force sensor for an energy autonomous monitoring system. An AlN thin film on an Al₂O₃ substrate is used as a piezoelectric layer in the sensor system and produces the necessary energy for its operation. Sputtered molybdenum and aluminium layers are used as lower and upper sensing electrodes, respectively. The effects of AlN thickness, electrode thickness, and electrode surface modification on AlN piezoelectric properties are measured. Si₃N₄ is used to enhance the piezoelectric properties of AlN. Linearity, temperature dependence and repeatability of the sensor are measured and characterised.

Keywords

alumina; aluminium compounds; electric sensing devices; force sensors; nitrogen compounds; silicon compounds; thin film sensors; Al₂O₃; AlN; Si₃N₄; aluminium layer; electrode surface modification; energy autonomous monitoring system; energy autonomous sensor system; piezoelectric force sensor; piezoelectric layer; sputtered molybdenum; thin film; Rough surfaces; Strain; Substrates; Surface roughness; Surface treatment; Temperature measurement; Temperature sensors; AlN; Ceramic; Energy Autonomous Sensors; Force sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969176

Filename

5969176