Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change

Author

Chiang, Chia-Fang ; Graham, Andrew B. ; Messana, Matthew W. ; Provine, J. ; Buchman, Daniela T. ; O´Brien, Gary J. ; Kenny, Thomas W.

Author_Institution

Stanford Univ., Stanford, CA, USA

fYear

2011

fDate

5-9 June 2011

Firstpage

894

Lastpage

897

Abstract

Unlike a traditional capacitive pressure sensor, which uses the entire deflectable diaphragm as the electrode, this paper proposes the use of reduced electrode area to increase the fractional capacitance change and reduce the device´s sensitivity to package stresses. Therefore, in addition to the low temperature sensitivity inherent in capacitive sensing, the proposed pressure sensor helps relax signal conditioning requirements typically associated with capacitive sensor interface circuitry.

Keywords

capacitive sensors; electrodes; pressure sensors; capacitive absolute pressure sensor; fractional capacitance; independent electrode; membrane size; signal conditioning; stresses; temperature sensitivity; Capacitance; Capacitance measurement; Cavity resonators; Electrodes; Sensitivity; Stress; Temperature measurement; Capacitive pressure sensor; microfabrication; silicon seal;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969187

Filename

5969187