FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures

Author

Phan, D.T. ; Chung, G.S.

Author_Institution

Sch. of Electr. Eng., Univ. of Ulsan, Ulsan, South Korea

fYear

2011

fDate

5-9 June 2011

Firstpage

1160

Lastpage

1163

Abstract

In this study, we demonstrate a finite element method (FEM) simulation approach of surface acoustic wave (SAW) humidity sensors. The polycrystalline Zinc oxide (ZnO)/ Aluminum nitride (AlN)/Si-layered structure was simulated for SAW resonators and compared with experiment results. The humidity absorption behaviors of ZnO films coating on the propagation characteristics of the SAW were investigated by FEM modeling in the absence and presence of water vapor. The simulation frequency shift in different relative humidity (RH%) agreed with experiments values and gave a new approach to SAW sensor designing based on piezoelectric thin films.

Keywords

finite element analysis; humidity sensors; piezoelectric thin films; surface acoustic wave sensors; zinc compounds; FEM modeling; SAW humidity sensor; ZnO; aluminum nitride; finite element method; humidity absorption behaviors; piezoelectric thin films; polycrystalline zinc oxide; surface acoustic wave; Films; Finite element methods; Humidity; Resonant frequency; Silicon; Surface acoustic waves; Zinc oxide; FEM modeling; SAW sensor; humidity sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969239

Filename

5969239