Surface acoustic wave gas sensor for monitoring low concentration ammonia

Author

Lin, T.H. ; Li, YT ; Hao, H.C. ; Fang, IC ; Yang, C.M. ; Yao, DJ

Author_Institution

Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan

fYear

2011

fDate

5-9 June 2011

Firstpage

1140

Lastpage

1143

Abstract

A surface acoustic wave (SAW) gas sensor coated with poly-N-vinylpyrrolidone (PNVP) film for monitoring low concentration ammonia was developed. By miniaturization of SAW chip and employment of polymer as sensing material, the sensitivity of SAW gas sensor can be improved. A dual-device configuration was applied to construct SAW gas sensor for eliminating detection deviation from environment such as temperature and humidity. Frequency shifts of SAW sensor were measured to monitor the presence of different concentration ammonia. The as-developed SAW gas sensor presented good repeatability and response to low concentration ammonia detection, even though the ammonia was below 10 ppm. The sensitivity of PNVP-coated SAW sensor for ammonia detection was 6.91 Hz/ppm, and the frequency shift of the as-developed SAW sensor to monitor 8 ppm ammonia was 27.5 Hz.

Keywords

ammonia; gas sensors; surface acoustic wave sensors; SAW chip; dual-device configuration; frequency 27.5 Hz; frequency shifts; low concentration ammonia; poly-N-vinylpyrrolidone film; surface acoustic wave gas sensor; Films; Sensors; Surface acoustic waves; Ammonia; Environmental monitoring; Gas sensor; Industrial gas; Surface acoustic wave;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969261

Filename

5969261