Hydrogen sensor based on palladium nanotube arrays fabricated by novel low-temperature hydrothermal synthesis

Author

Lim, M.A. ; Kim, D. ; Park, C.-O. ; Li, Z. ; Park, I.

Author_Institution

Dept. of Mech. Eng., KAIST, Daejeon, South Korea

fYear

2011

fDate

5-9 June 2011

Firstpage

120

Lastpage

123

Abstract

Palladium (Pd) nanotube array was fabricated by a facile solution process using hydrothermally synthesized ZnO nanowires as sacrificial templates and Pd precursor solution. The morphology, structure, and composition of the nanotubes were characterized by SEM, TEM, HAADF-STEM, and ICP-ACS, respectively. To investigate hydrogen sensing performance, Pd nanotube arrays were fabricated on interdigitated electrodes of a silicon chip and the electrical resistance change of Pd nanotube array sensor was measured depending on the concentration of hydrogen gas and operating temperature. Pd nanotube arrays sensor was also fabricated on polymer substrate by the same method and exhibited a good hydrogen detection performance.

Keywords

crystal growth from solution; gas sensors; nanosensors; nanotube devices; palladium; polymers; scanning electron microscopy; silicon; transmission electron microscopy; HAADF-STEM; ICP-ACS; Pd; SEM; Si; ZnO; electrical resistance; facile solution process; hydrogen sensor; hydrothermally synthesized nanowire; interdigitated electrode; lowtemperature hydrothermal synthesis; nanotube array; polymer substrate; precursor solution; sacrificial template; silicon chip; Nanowires; Sensitivity; Sensor arrays; Silicon; Substrates; Zinc oxide; Flexible Sensor; Hydrogen Sensor; Nanotube; Palladium;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969278

Filename

5969278