DocumentCode
2532578
Title
Hydrogel microvalve device modeling and simulation
Author
Ibrahim, M.W.A. ; Saunders, J.R. ; Walied, A. Moussa
Author_Institution
Multiphys. & MEMS simulation lab., Alberta Univ., Edmonton, Alta., Canada
fYear
2005
fDate
24-27 July 2005
Firstpage
221
Lastpage
222
Abstract
The modeling and simulation of fabricated 3D hybrid hydrogel microvalve using a commercial FE package is presented in this paper. A PDMS diaphragm is deflected to 197.5 μm. A stimulated hydrogel volume swelled to 465% of its original volume. Results of the finite element analysis are reported and a comparison to the fabricated model results is made.
Keywords
finite element analysis; microvalves; polymer gels; 3D hybrid hydrogel microvalve device modeling; finite element analysis; finite element package; polydimethylsiloxane diaphragm; Actuators; Fabrication; Finite element methods; Microchannel; Microfluidics; Micromechanical devices; Microvalves; Packaging; Sensor phenomena and characterization; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.56
Filename
1540821
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