DocumentCode
2535778
Title
Individual single-walled carbon nanotubes with vertical alignment
Author
Kato, T. ; Jeong, G.-H. ; Hirata, T. ; Hatakeyama, R. ; Tohji, K.
Author_Institution
Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan
fYear
2004
fDate
16-19 Aug. 2004
Firstpage
541
Lastpage
543
Abstract
In this report, we demonstrate the successful synthesis of vertically-aligned single-walled carbon nanotubes (SWNTs) using plasma-enhanced chemical vapor deposition method. According to analysis by transmission electron microscopy, it is also found that short-length individual SWNTs are grown with one way aligned form. Furthermore, the correlation between SWNT growth and plasma effects has been also investigated in detail using a Langmuir probe and optical emission spectroscopy.
Keywords
carbon nanotubes; luminescence; nanotechnology; plasma CVD; transmission electron microscopy; C; Langmuir probe; SWNT growth; optical emission spectroscopy; plasma effects; plasma enhanced chemical vapor deposition; transmission electron microscopy; vertically-aligned single-walled carbon nanotubes; Carbon nanotubes; Plasma chemistry; Plasma measurements; Plasma temperature; Probes; Production; Radio frequency; Scanning electron microscopy; Spectroscopy; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN
0-7803-8536-5
Type
conf
DOI
10.1109/NANO.2004.1392413
Filename
1392413
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