Dynamic optimization of valveless micropump

For the first time, this paper reports on an effective topology optimization method to improve the output net flux for valveless micropumps. The micropump considered here is actuated by the vibration of membranes and can generate a net flow along the optimized rigid fluidic channel. The detailed layout of the micropump channel is optimized with respect to a number of factors which influence the output net flux of liquid, such as the number of actuation elements, the positions of actuation elements, the driving phase differences and the driving frequency. Accordingly, the layouts of several novel valveless micropumps are presented.