Mixed-level modeling of squeeze film damping in MEMS: Simulation and pressure-dependent experimental validation

We present the first results of a systematic study of squeeze film damping (SQFD) in MEMS, in which we compare the measured and simulated quality factors of a series of specifically designed devices at varying pressure. Three models are employed to calculate the quality factor: an analytical-heuristic compact model by Veijola, a numerical mixed-mode model by Veijola and a mixed-level model by the authors of this work. At normal pressure the mixed-level model produces, with a maximum error of only 7%, the most accurate results for the specimens considered demonstrating the predictive power of this rigorously physics-based modeling approach. The Veijola models produce maximum errors of up to 38% and 84%, respectively. Versus pressure, the highest errors occur in the transition regime between the continuum and the molecular gas regime.