DocumentCode
2536996
Title
Integrated thin-film piezoelectric traveling wave ultrasonic motors
Author
Smith, G.L. ; Rudy, R.Q. ; DeVoe, D.L. ; Polcawich, R.G.
Author_Institution
U.S. Army Res. Lab., Adelphi, MD, USA
fYear
2011
fDate
5-9 June 2011
Firstpage
1464
Lastpage
1467
Abstract
An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor stators ranging in diameter from 1-3 mm using wafer scale MEMS fabrication techniques. Using laser Doppler vibrometry (LDV), we have demonstrated traveling waves in the bulk silicon elastic medium of the stator. Furthermore, the resonant modes of the fabricated stators have been modeled, and experimental results agree well with these simulations.
Keywords
micromechanical devices; silicon; stators; ultrasonic motors; Si; bulk silicon elastic media; integrated thin film piezoelectric traveling wave ultrasonic motors; laser Doppler vibrometry; size 1 mm to 3 mm; ultrasonic motor stator; wafer scale MEMS fabrication techniques; Acoustics; Fabrication; Finite element methods; Predictive models; Shape; Silicon; Stators; MEMS; Motor; PZT; Piezoelectric; Ultrasonic;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969627
Filename
5969627
Link To Document