• DocumentCode
    2539108
  • Title

    Table top ultraviolet lasers enable new nano-patterning schemes

  • Author

    Marconi, M.C. ; Urbanski, L. ; Wachulak, P. ; Isoyan, A. ; Jiang, F. ; Cheng, Y. ; Rocca, J.J. ; Menoni, C.S. ; Cerrina, F.

  • Author_Institution
    Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO, USA
  • fYear
    2009
  • fDate
    4-8 Oct. 2009
  • Firstpage
    53
  • Lastpage
    54
  • Abstract
    We present results with different nanopatterning techniques using table top extreme ultraviolet lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography.
  • Keywords
    Talbot effect; holography; laser materials processing; nanolithography; nanopatterning; nanophotonics; photolithography; Talbot self imaging; holographic projection lithography; interferometric lithography; nanopatterning techniques; table top extreme ultraviolet lasers; Atomic force microscopy; Holographic optical components; Holography; Interferometric lithography; Laser theory; Nanopatterning; Optical imaging; Optical interferometry; Resists; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
  • Conference_Location
    Belek-Antalya
  • ISSN
    1092-8081
  • Print_ISBN
    978-1-4244-3680-4
  • Electronic_ISBN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/LEOS.2009.5343472
  • Filename
    5343472
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2539108