Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity

Author

Abdulla, S.M.C. ; Kauppinen, L.J. ; de Ridder, M. ; Krijnen, G.J.M.

Author_Institution

Transducers Sci. & Technol. Group, Univ. of Twente, Enschede, Netherlands

fYear

2011

fDate

5-9 June 2011

Firstpage

2534

Lastpage

2537

Abstract

A micro-bimorph cantilever is monolithically integrated with a photonic crystal micro-cavity based device, using surface micro-machining techniques. The integrated cantilever is equipped with self-aligned dielectric tips with respect to the holes of the photonic crystal and on electrostatic actuation, the tips move into the holes, providing electro-opto-mechanical modulation of guided waves. The device is designed to operate in the C-band of the telecommunication wavelengths and constitute a promising candidate for future integrated optical devices.

Keywords

disperse systems; electrostatic actuators; microcavities; micromachining; photonic crystals; dispersion tuning; electro-opto-mechanical modulation; electrostatic actuation; integrated optical devices; integrated self-aligned tip; microbimorph cantilever; photonic crystal microcavity; surface micromachining technique; telecommunication wavelengths; Gratings; Optical imaging; Optical modulation; Optical variables measurement; Photonics; Tuning; band edge tuning; electromechano-optical modulation; micro-bimorph; monolithic integration; photonic crystal micro-cavity; self-aligned tips; wavelength tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969763

Filename

5969763